金伟锋,$2,$2.基于QPD的单透镜微角度测量系统及其关键技术研究[J].轻工机械,2011,29(3): |
基于QPD的单透镜微角度测量系统及其关键技术研究 |
Research Based on QPD Single lens Micro angle Measurement System and Its Key Technology |
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DOI: |
中文关键词: 精密加工 微角度测量 4象限光电二极管(QPD) 单透镜 |
英文关键词:precision machining micro angle measurement quadrant photodiode(QPD) single lens |
基金项目: |
金伟锋 $2 $2 |
浙江大学 流体传动及控制国家重点实验室 |
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中文摘要: |
介绍了一种基于QPD的单透镜微角度测量系统。通过对其关键技术如采取的光学原理、光学器件光电探测器的选择和离焦设置,小尺寸的可行性分析计算等,最后得出设计出一种结构紧凑,体积小,携带方便,灵敏度高,可测量微小角度的测量系统的可行性。[HTK]同时通过实验得出测量系统大致的测量范围和测量精度。 |
英文摘要: |
A single lens micro-angle measurement system, which used QPD as position sensing device is introduced in this paper. In the research, lots of its key technologies about the system have been analyzed such as adopted optical principle, the option and defocussing setting of optical devices like photoelectric detector and calculation and analysis of the feasibility of small size and so on. Through these research, the possibility of designing a compact and portable micro-angle measurement system with high sensibility and small volume was confirmed. Furthermore, the measurement range and accuracy of this micro angle measurement system are obtained by experiment. |
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