| 高强， 宋芳.晶圆传输机器人末端执行器的结构设计[J].轻工机械,2018,36(6):15-19 |
| 晶圆传输机器人末端执行器的结构设计 |
| Structure Design and Optimization of End Effector for Wafer Transfer Robot |
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| DOI：10.3969/j.issn.1005 2895.2018.06.004 |
| 中文关键词: 晶圆传输机器人 末端执行器 UG软件 ANSYS仿真 |
| 英文关键词:wafer transfer robot end effector UG ANSYS simulation |
| 基金项目:国家自然科学基金青年科学基金项目：基于微结构阵列的高摩擦低粘附晶圆高效传输机理与主动控制方法研究（51505273） |
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| 中文摘要: |
| 为了实现晶圆片快速稳定传输，课题组设计了3种不同机械结构的末端执行器。首先，利用三维UG软件建立4凸点接触式有结构孔且有过渡结构的末端执行器、3凸点接触式类三角形末端执行器和4凸点接触式仅有结构孔的末端执行器这3种模型；采用ANSYS软件对所设计的3种模型进行静力学仿真，通过对仿真结果进行分析，得出最优的机械结构；最后采用ANSYS动力学模态仿真，验证了此机械结构具有合理性。研究结果表明有结构孔且有过渡结构的末端执行器能够满足晶圆片高速稳定的传输，为最优的机械结构。 |
| 英文摘要: |
| In order to realize the fast and stable transmission of wafers, three end effectors with different mechanical structures were designed by the research group. Firstly, three dimensional UG software was used to establish four models of four point contact structured end effector with transition structure, three point contact type triangular end effector and four bump contact end effector with only structural hole.Then the designed three models were statically simulated by ANSYS software. Through the analysis of the simulation results, the optimal mechanical structure was obtained, finally the dynamics modal simulation of ANSYS was used. Modal simulation validated the rationality of this mechanical structure. The results show that the end effector with structural holes and transitional structure can meet the high speed and stable transmission of wafers, which is the optimal mechanical structure. The designed end effector provides experimental basis for the control method research of the subsequent wafer transmission platform. |
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