| 王宁， 马盼， 王旭， 刘浩东， 赵万芹.液体辅助氮化铝陶瓷飞秒激光直冲式盲孔加工[J].轻工机械,2023,41(6):82-86 |
| 液体辅助氮化铝陶瓷飞秒激光直冲式盲孔加工 |
| Liquid Assisted Aluminium Nitride Ceramics Femtosecond Laser Direct Punch Blind Hole Processing |
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| DOI：10.3969/j.issn.1005 2895.2023.06.012 |
| 中文关键词: 激光加工 氮化铝陶瓷 盲孔 液体辅助 |
| 英文关键词:laser processing aluminum nitride ceramics blind hole liquid assist |
| 基金项目:国家自然科学基金（52105465）。 |
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| 摘要点击次数: 78 |
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| 中文摘要: |
| 为探究采用液体辅助加工技术提高飞秒激光直冲式盲孔加工质量的可行性，课题组设计了一种液体辅助激光加工装置。选择纯水、质量分数为75%的乙醇溶液以及盐酸乙醇混合溶液作为辅助液体用于激光加工，在激光加工参数重复频率为0.3 MHz、单脉冲能量为20 μJ、脉冲数为250~20 000时，探究了不同液体辅助加工条件下盲孔尺寸和盲孔的孔口、侧壁形貌变化规律，并分析了相关形貌和缺陷的产生原因和机理。结果表明：在盐酸乙醇混合溶液中进行直冲式盲孔加工，加工出的盲孔孔形相对规整，孔口和侧壁的形貌质量较高。液体辅助激光加工是提高氮化铝陶瓷飞秒激光直冲式盲孔加工质量的一种有效方法。 |
| 英文摘要: |
| To investigate the feasibility of using liquid assisted processing technology to improve the quality of femtosecond laser direct punching blind hole,a liquid assisted laser processing device was designed.Pure water,an ethanol solution with a mass fraction of 75% and a hydrochloric acid ethanol mixture were selected as auxiliary fluids for liquid assisted laser processing. The changes rules in blind hole size and the morphology of blind hole openings and sidewalls under different liquid assisted processing conditions were investigated，when the laser processing parameters were repetition frequency of 0.3 MHz and single pulse energy of 20 μJ and the pulses of 250 to 20 000.And the causes and mechanisms of related morphologies and defects were analyzed. The results show that direct punching of blind hole in a mixture of hydrochloric acid and ethanol results in relatively well processed blind holes with high quality orifices and sidewalls. Liquid assisted laser processing is an effective method for improving the quality of femtosecond laser direct punch blind hole in aluminium nitride ceramics. |
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